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Brewer Science发布新型光感化合物专利 用于MEMS器件制造

2020-11-14 17:33:05 jfnxf.cn

半导体及微电子市场高新技术创新公司Brewer Science宣布公司在美国获得了一项新专利,该专利是关于一种新型光感化合物,在MEMS器件的制造过程中可用作保护层。

Brewer Science, Inc., Issued U.S. Patent for Protective Coating System

Used in the Manufacturing of Microelectronic Devices

Rolla, Missouri, April 23, 2010 - Brewer Science, Inc., a major innovator of high-technology solutions for the semiconductor and microelectronics markets, is pleased to announce that it has been issued a new patent by the U.S. Patent and Trademark Office:

U.S. Patent No. 7,695,890 covers a new photosensitive composition useful as a protective layer in the manufacture of microelectronic devices used in microelectromechanical systems (MEMS).

Brewer Science’s new invention provides a spin-applied, photosensitive coating system that replaces prior art masks or protective coatings, eliminating the need for additional photoresists.

The new system protects device features from corrosion and other forms of attack during etching processes.

The invention will allow customers to save time and expense over previous technologies, which required additional protective layers and etching. This new technology will enhance throughput by reducing the number of process steps and simplify the process flow with minimal impact on overall performance. The photosensitive etch protection coating can be used to create throughwafer pressure membranes and vias. The coating system also has applications in fabricating pressure sensors, silicon microphones, and RF MEMS devices.

Providing new technologies is a part of Brewer Science’s commitment to its customers to help them achieve success with current and future technologies. Brewer Science enables advancements in future technology.

About Brewer Science

Brewer Science delivers innovative material, process, and equipment solutions for various applications including lithography, advanced packaging, MEMS, nanotechnology, optoelectronics, and compound semiconductors. The inventor of ARC? anti-reflective coating products for the microlithography world, Brewer Science continues to expand its scope with ProTEK? temporary etch protective coatings, WaferBOND? temporary bonding materials, OptiNDEX? high refractive coatings, CNTRENE? microelectronics-grade carbon nanotube solutions, and Cee? processing equipment. Exceptional technical expertise and extensive semiconductor industry knowledge,

combined with world-class product and customer support, make Brewer Science a company that consistently enhances the value of the entire electronics industry. Brewer Science’s global headquarters is located in Rolla, Missouri, USA. Learn more about Brewer Science by visiting

www.brewerscience.com.


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